2381
Superconformal Film Growth: Challenges and Opportunities

Tuesday, October 29, 2013: 09:00
Union Square 23/24, Tower 3, 4th Floor (Hilton San Francisco Union Square)
Thomas P. Moffat , NIST, Gaithersburg, MD
Guokun Liu , NIST
Shouzhong Zou , Miami University
Lee Richter , NIST
Liang-Yueh Ou Yang , NIST
Daniel Wheeler , NIST
Daniel Josell , NIST, Gaithersburg, MD

Abstract:

See more of: Electrochemical Nanofabrication in Emerging Applications
See more of: F5: Emerging Opportunities in Electrochemical Deposition for Nanofabrication
See more of: Electrochemical/Chemical Deposition and Etching
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