Welcome and Keynote

Monday, October 28, 2013: 08:50-10:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Chairs:
Jerzy Ruzyllo and Takeshi Hattori
08:50
Welcoming Remarks
09:00
2094
(Keynote) Roadmap Of Future Devices and Related Cleaning Challenges/Opportunities
Paul W. Mertens, imec
09:40
Coffee Break
See more of: E8: Semiconductor Cleaning Science and Technology 13 (SCST 13)
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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