E8 Semiconductor Cleaning Science and Technology 13 (SCST 13)
Lead Organizer:
Jerzy Ruzyllo (The Pennsylvania State University)
Co-organizers:
Takeshi Hattori (Hattori Consulting International)
,
Paul W. Mertens (imec)
and
Richard E. Novak (Novak Consulting)
Monday, October 28, 2013
08:50-10:00
Welcome and Keynote
Continental 8, Tower 3, Ballroom Level
Chair(s): Jerzy Ruzyllo and Takeshi Hattori
10:00-12:00
Particle Removal
Continental 8, Tower 3, Ballroom Level
Chair(s): Richard E. Novak and Jerzy Ruzyllo
14:00-16:40
Tuesday, October 29, 2013
08:50-12:00
FEOL & BEOL Cleaning
Continental 8, Tower 3, Ballroom Level
Chair(s): Paul W. Mertens and Akshey Sehgal
14:00-16:00
16:00-18:10
18:00-20:00
Poster
Grand Ballroom, Tower 2, Grand Ballroom Level
Wednesday, October 30, 2013
08:10-11:00
11:00-11:50
