E8 Semiconductor Cleaning Science and Technology 13 (SCST 13)

Lead Organizer: Jerzy Ruzyllo (The Pennsylvania State University)

Co-organizers: Takeshi Hattori (Hattori Consulting International) , Paul W. Mertens (imec) and Richard E. Novak (Novak Consulting)

Monday, October 28, 2013

08:50-10:00


Welcome and Keynote
Continental 8, Tower 3, Ballroom Level
Chair(s): Jerzy Ruzyllo and Takeshi Hattori

10:00-12:00


Particle Removal
Continental 8, Tower 3, Ballroom Level
Chair(s): Richard E. Novak and Jerzy Ruzyllo

14:00-16:40


Wet Etching and Cleaning
Continental 8, Tower 3, Ballroom Level
Chair(s): Srini Raghavan and Harald F. Okorn-Schmidt

Tuesday, October 29, 2013

08:50-12:00


FEOL & BEOL Cleaning
Continental 8, Tower 3, Ballroom Level
Chair(s): Paul W. Mertens and Akshey Sehgal

14:00-16:00


Wafer Drying and Wetting Issues
Continental 8, Tower 3, Ballroom Level
Chair(s): Richard E. Novak and Guy Vereecke

16:00-18:10


Photeresist Removal and Related Topics
Continental 8, Tower 3, Ballroom Level
Chair(s): Srini Raghavan and Richard E. Novak

18:00-20:00


Poster
Grand Ballroom, Tower 2, Grand Ballroom Level

Wednesday, October 30, 2013

08:10-11:00


Non-silicon Material Cleaning and Conditioning
Continental 8, Tower 3, Ballroom Level
Chair(s): Paul W. Mertens and Jeongwon PARK

11:00-11:50


Metallic Contamination Analysis
Continental 8, Tower 3, Ballroom Level
Chair(s): Takeshi Hattori and Jerzy Ruzyllo