(Invited) Atom Switch Technology for Low-Power Nonvolatile Logic Application
Atom switch is an electrochemical resistive-change device categorized in the cation type . The electrochemical phenomenon is nonvolatile and based on electrolysis of the Cu electrode to produce a precipitation of Cu between the electrodes, which realizing a high ON/OFF conductance ratio. Previously, we reported a replacement of the SRAM-based switch with atom switch integrated in Cu-BEOL (Fig.2) . An elimination of the forming process and high ON/OFF-state reliabilities have been realized by introducing a polymer solid-electrolyte (PSE) , a complementary atom switch (CAS)  and alloy electrodes .
As compared to a two-terminal device, a three-terminal device is advantageous for the logic application since the separation of the programming line and signal transfer line simplifies circuit design and reduces the layout area. In this paper, a three-terminal resistive-change device featuring the resistive-change junctions coupled with the diode-inserted gate is discussed.
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