1515
(Invited) Rapid C-reactive Protein Detection with AlGaN/GaN High Electron Mobility Transistors in an Integrated Microfluidic System
Figure 1 (a) and (b) show the schematic of HEMT and the top-view of the multifunctional microfluidic system. To create a high quality HEMT device, a 3 μm-thick undoped GaN buffer layer and a 150 Å-thick undoped Al0.25Ga0.75N layer were deposited by metal-organic chemical vapor deposition (MOCVD) on the substrate. Mesa isolation was formed by Inductively Coupled Plasma (ICP) etching system for for 28 seconds. Ti, Al, Ni and Au were deposited by Electron Beam Evaporation and were annealed at 850 °C for 45 seconds under N2flowing to form Ohmic contacts. A 100 Å-thick Au layer was deposited on the gate region as gate metal. All the area of HEMT was encapsulated by photoresist with only gate region open for aptamer immobilization and CRP sample detection. The multifunctional microfluidic system was covered on top of the HEMT and sealed by double- site tape under hot press.
Figure 2 shows the procedure of aptamer immobilization and CRP detection. First, the aptamer was injected into the channel and mixed for 24 hours at 25 °C to allow the aptamer immobilized on the gate surface. Unbound aptamer was washed away by aptamer washing buffer. Second, CRP sample was injected into the channel and mixed for a few minutes for CRP binding with aptamer. Unbound CRP was washed away by CRP washing buffer. Third, the current change induced from the binding of CRP and aptamer was extracted by a constant bias of 0.5V applied on HEMT.
Figure 3 shows the current changed induced by different concentrations of CRP after normalized. The current changes shows a high linear relation to the CRP concentrations with R2= 0.98455. The detection limit is 0.026 nM and the detection only completed in 3000 seconds. Comparing to the conventional method, the detection by using HEMT integrated microfluidic system comes with high sensitivity and low response time. It will be a potential method in the further CRP research.