C-MEMS Based Microsupercapacitors and Microsensors

Micro-supercapacitors with high pulse power and long cycle lifetime have attracted a great deal of attention for various emerging micropower applications. Recently, there have been several efforts to improve device architecture for the next generation high power and energy density micro-supercapacitors. These devices are usually fabricated by depositing the active materials on interdigitally arranged current collectors of micron-size. We have explored various techniques, materials and structural designs for micro-supercapacitors. In this talk, Carbon-Microelectromechanical systems (C-MEMS) based various supercapacitor systems will be briefly introduced. Both two and three dimensional micro-electrodes where fabricated and various electroactive materials where integrated on the microelectrodes. These include carbon nanotubes (CNTs), Polypyrrole and manganese oxide. More recently we have also examined the integration of Graphene sheets into micro-electrodes as promising high power and energy density material.