Solid State Topics General Session
Wednesday, May 14, 2014: 14:00-15:40
Bonnet Creek Ballroom VII, Lobby Level (Hilton Orlando Bonnet Creek)
Chairs:
Kalpathy B Sundaram
and
O. M. Leonte
14:00
Detection of Synthesized Cyanide of Plated Films and in the Plating Bath -Especially for Cyanide from Cyanide Free Bath-
I. Koiwa (Department of Applied Chemistry, College of Science and Engineering, Kanto Gakuin University), N. Watanabe (Kanto Gakuin University), S. Koike (Department of Applied Chemistry, College of Science and Engineering, Kanto Gakuin University), N. Hirashita, M. Urano, and K. Maejima (Engineering Division, ESCO Ltd.)
14:20
NF3/NH3 Dry Cleaning Mechanism Inspired by Chemical and Physical Surface Modification of Si, SiO2, and Si3N4
H. J. Oh (BIO-IT Micro Fab Center, Yonsei University), J. H. Lee, M. S. Lee (Department of Materials Science and Engineering, Yonsei University), W. G. Shin, S. Y. Kang, G. D. Kim (Gen Co. Ltd., Korea), and D. H. Ko (BIO-IT Micro Fab Center, Yonsei University, Department of Materials Science and Engineering, Yonsei University)