P4 Plasma Processing 20

Lead Organizer: S. Mathad (S/C Technology Consulting)

Co-organizers: Dennis W. Hess (Georgia Institute of Technology) , O. M. Leonte (Berkeley Polymer Technologies, Inc.) and M. Engelhardt (Infineon Technologies)

Tuesday, 7 October 2014

Tuesday | top

08:50-11:40


General Plasma Processes
Expo Center, 1st Floor, Universal 5
Chair(s): S. Mathad and O. M. Leonte

13:40-16:20


Plasma Etching Processes
Expo Center, 1st Floor, Universal 5
Chair(s): M. Engelhardt and Dennis W. Hess