General Plasma Processes

Tuesday, 7 October 2014: 08:50-11:40
Expo Center, 1st Floor, Universal 5 (Moon Palace Resort)
Chairs:
S. Mathad and O. M. Leonte
08:50
1667
Fabrication of Uniform Sized Metal Spheres by Plasma Induced Dewetting
D. H. Han, S. M. Lee (Thin film technology team, Memory Division, Samsung electronics), J. J. Lee (Material Science and Engineering, Seoul National University), D. Kim, J. Choi, and J. Won (Thin film technology team, Memory Division, Samsung electronics)
09:10
1668
Nuclear Forensics Using Plasma Source Ion Beams
R. Boswell (Australian National University), N. Smith (Oregon Physics), C. Charles (Australian National University), N. Martin, and P. Tesch (Oregon Physics)
09:30
Break
10:00
1669
Experiments and Modeling of Gas Heating in a Radio-Frequency Plasma Jet
R. Boswell, C. Charles, A. Greig, and S. Dixon (Australian National University)
10:40
1670
Overcoming High Performance Semiconductor Packaging Challenges Using Plasma
D. Foote (Nordson March)
11:20
1671
Plasma Solutions for Life Sciences and Medical Device Manufacturing
D. Foote (Nordson March)
See more of: P4: Plasma Processing 20
See more of: Electronic Materials and Processing
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