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Growth of Nickel Silicide/Platinum Silicide Axial Nanowire Heterostructure through Solid-State Reaction
In this work, we fabricated two different metal pads (nickel/platinum), served as contact with silicon nanowires (NWs) to study nickel silicide/platinum silicide axial heterostructure through solid-state reaction. The as-fabricated Si NWs with two contact electrodes were annealed in ultrahigh vacuum in-situ transmission electron microscopy (UHV in-situ TEM) at 550℃ for observation of the reaction process. The structural information of dual silicide nanostructure was analyzed by spherical aberration corrected scanning transmission electron microscopy (Cs-corrected STEM) and we successfully got nickel silicide/platinum silicide axial heterostructure.
With the understanding of the nickel silicide transformation mechanism in 1-D system, reliable 1-D NiSi nanostructures would be generally applicable to semiconductor industry.