D04 Poster Session

Wednesday, October 14, 2015: 18:00-20:00
West Hall 1 (Phoenix Convention Center)
Chairs:
Samares Kar and Dolf Landheer
858
Enhanced Charge-Transport Behavior on PbS Nanocrystals Capped with Atomic Ligands
S. Yoon, J. U. Ha, J. Cho (Chung-Ang University), and D. S. Chung (Chung-Ang University)
859
A Study on Chamber Contamination Control of Rapid Thermal Nitridation Process By Applying Quartz Liner
J. H. Yun (Samsung Institute of Technology, Samsung Electronics), S. G. Park (Samsung Institute of Technology), B. J. Kang, Y. H. Lee, J. S. An (Samsung Electronics), and I. S. Cho (Samsung Electronics)
860
The Improvement Magnet Plate on a Reticle Stage of Lithography Equipment through Analyzing Adhesive and Roughness of Plate
I. H. Yu (Samsung Institute of Technology, Samsung Electronics Co., Ltd), G. R. Kim (Samsung Institute of Technology), H. S. Jung (Samsung Electronics Co., Ltd.), and J. S. Bae (Samsung Electronics Co., Ltd.)