RF Glow Discharge Optical Emission Spectroscopy (RF GD-OES) provides elemental depth profile analysis for both conductive and non-conductive samples, allowing the study of coatings, thin and thick films but also on diffusion effects between layers and materials.

The analysis is done by sputtering the sample and detecting in real time all elements using a high resolution optical spectrometer. All elements from H to U can be measured using RF GD-OES and the technique is showing a good sensitivity for light elements such as Li, C, H, O or F.

With its ability to perform depth profiling with a nanometric resolution and to go up to 150 µm down in the sample, RF GD-OES is a perfect tool for the study of Lithium Batteries and gives complementary information to SIMS or XPS at a much lower cost and within minutes.

Some specific accessories especially developed for the analysis of Lithium batteries will be presented as well as results on the study damaged electrodes and the identification of the cause of it and the study of electrodes after charge and discharge cycles and how elements can diffuse from the electrolyte or the binder. Other possible applications of RF GD-OES will be presented as well as a brief comparison of its characteristics compared to XPS or SIMS.