ZnO based thin films are commonly used as transparent conductive oxides (TCO). There is increasing attention paid to improving transparent conductive electrodes for applications in photovoltaic devices, displays and electronics. However, simple deposition technology with better properties than the present generation are required for new devices. In this study, ZnO based TCO films with different dopants were prepared by magnetron sputtering technique at room temperature. A relationship between the microstructure and optoelectronic properties of sputtered ZnO based films was studied.

As a potential transparent anode electrode for thin film batteries, the electrochemical behavior were further investigated. The electrochemical test show that the highest capacity of 300 mAh/g was obtained, which is higher than that of traditional graphite anode. In comparison with the resistivity results, the conductivity shows a positive effect in enhancing the specific capacity. High conductivity will provide more chance for the reaction between Li and active materials. The cycling test shows that a reversible capacity of 150 mAh/g can be achieved even after 200 cycles. The research reveals that ZnO based films with low electrical resistance are in favour of their electrochemical performance.