Acoustic wave devices have been used as sensor platforms for the development of biological sensors, in which the surface of the acoustic wave device is coated with a layer of biomolecular recognition unit such as phage and antibody. The sensitivity and many other characteristics of the acoustic wave device based sensors are dependent on the size of the device. The smaller the size of the acoustic wave device is, the higher the sensitivity of the sensor is. Therefore, it is highly interested to fabricate the acoustic wave devices with a smaller size, such as micro/nano-sized devices. It has been experimentally demonstrated that the acoustic wave devices based on the magnetostrictive effect have many advantages over the acoustic wave devices base on effect. For example, the acoustic wave devices based on magnetostrictive effect can be operated wirelessly/remotely, which is very critical, especially for micro/nano-sized acoustic wave devices.

Electrochemical deposition is used to fabricate the magnetostrictive Co-Fe-B alloy in different shapes and sizes. In this presentation, the process to fabricate the nano-sized magnetostrictive Co-Fe-B tubes and bars is reported. The properties of the nano-tubes/bars are characterized and discussed in this presentation. Based on the experimental results, the fabrication process (i.e. the solution concentration, solution temperature, deposition current, and deposition time) is optimized to achieve a high magnetostriction and a quality merit factor.