Since these materials are prepared at low p(O2) and are stable in reducing atmospheres, Ce4.67(SiO4)3O-based thin film apatites exhibiting high conductivity are of relevance as anodes for intermediate temperature thin film SOFC application. In order to evaluate the performance of the apatite anode in SOFC devices, thin film apatites were grown on Sc-stabilized ZrO2/LSCF electrolyte/cathode substrates. Bilayer anode of apatite/Pt and Ni-apatite composite anode were also utilized in the identical electrolyte/cathode system and the performance were compared. The noteworthy SOFC performance (e.g., peak power density of ~100 mW/cm2 at 748 K) and superior stability were observed in Ni-apatite SOFCs due to higher catalytic activity and low contact resistance at the electrolyte/anode interface compared to those with a single layer apatite anode and bilayers of apatite/Pt anode. The present study demonstrating intermediate temperature synthesis of Ce4.67(SiO4)3O-based oxy-apatites and their high conductivity may significantly contribute to the field of intermediate temperature thin film SOFC application.