β-Ga2O3/h-BN hetero-structure based quasi-two-dimensional metal insulator semiconductor field-effect transistors(MISFETs) are fabricated. The h-BN dielectric, which has an extraordinarily flat and clean surface, provides a minimal density of charged impurities at the interface between β-Ga2O3 and h-BN, resulting in excellent device performances. The fabricated MISFETs showed superior drain current modulation with high on/off ratio and low gate leakage current. The double-gating of the fabricated device was demonstrated by biasing both top and bottom gates, achieving the modulation of the threshold voltage.
N-channel β-Ga2O3/WSe2 heterostructure junction field effect transistors (JFETs) are demonstrated with good gate modulation and negligible hysteresis. Tungsten diselenide (WSe2) is mostly known as a stable p-type 2D layered material. The fabricated heterostructure JFETs also showed excellent ambient stability. The successful JFET operation is attributed to Van der Waals junction interface between β-Ga2O3 and WSe2. These heterostructured wide-band-gap nanodevices show a new route toward stable and high-power nanoelectronic devices. The details of the fabrication procedure and results will be presented.