1418
(Invited) High Performance β-Ga2O3 Nano-Membrane Field-Effect Transistors on Sapphire Substrate with Reduced Self-Heating Effect

Tuesday, 15 May 2018: 11:30
Room 213 (Washington State Convention Center)
H. Zhou (UC Berkeley, Purdue University), K. Maize, J. Noh, A. Shakouri, and P. D. Ye (Purdue University)
As a newly emerged semiconductor, β-Ga2O3 has an ultra-wide bandgap (Eg) of 4.8 eV and corresponding empirical high electrical breakdown field (Ebr) of 8 MV/cm as well as 300 cm2/V·s room temperature (RT) mobility (μ), which is identified as the next generation semiconductor to replace GaN and SiC. However, β-Ga2O3 field-effect transistors (FETs) on its native substrates suffer from severe self-heating effect due to its low thermal conductivity of 10~25 W/m·K. One approach to minimize self-heating effect is introducing β-Ga2O3 on insulator (GOOI) FET structure by replacing β-Ga2O3 native substrate with a higher κ and wider Eg substrate through wafer bonding technique. Here, we demonstrate that by utilizing a higher thermal conductivity sapphire substrate rather than SiO2/Si substrate, the temperature rise above room temperature of β-Ga2O3 GOOI FET can be reduced by a factor of 3 and thereby the self-heating effect is significantly reduced. Both thermo-reflectance characterization and simulation verify that the thermal resistance on sapphire substrate is less than 1/3 of that on SiO2/Si substrate. Therefore, maximum drain current density of 535 mA/mm is achieved on sapphire substrate, which is 70% higher than that on SiO2/Si substrate, due to reduced self-heating. Integration of β-Ga2O3 channel on a higher thermal conductivity substrate opens a new route to address the low thermal conductivity issue of β-Ga2O3 for power electronics applications.