G02 - Tutorial on Atomic Layer Processing for Advanced Electronics

Tuesday, 15 October 2019: 08:20-09:00
Room 214 (The Hilton Atlanta)
Chairs:
Andrea Illiberi and Fred Roozeboom
08:20
(Invited) Atomic Layer Processing for Advanced Electronics
G. J. Leusink (Tokyo Electron Limited)
See more of: G02: Atomic Layer Deposition Applications 15
See more of: Electronic Materials and Processing
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