G02 Atomic Layer Deposition Applications 15

Lead Organizer: Fred Roozeboom (Eindhoven University of Technology, TNO-Holst Centre)

Co-organizers: Stefan De Gendt (KU Leuven, imec) , Jolien Dendooven (Department of Solid State Sciences, Ghent University) , Jeffrey W. Elam (Joint Center for Energy Storage Research) , Oscar van der Straten (IBM Corporation Research Center) , Chanyuan Liu (Lam Research) , Andrea Illiberi (ASM Europe) and Ganesh Sundaram (Veeco-CNT)

Monday, 14 October 2019

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08:35-09:20


G02 - Tutorial on ALD for Lithium-Ion Battery Applications
Room 214
Chair(s): Fred Roozeboom and Chanyuan Liu

09:20-11:00


G02 - Battery Applications
Room 214
Chair(s): Chanyuan Liu and Mark D. Losego

11:00-11:40


G02 - Medical Applications
Room 214
Chair(s): Ganesh Sundaram and Jolien Dendooven

11:40-12:40


G02 - Nano and Flexible Electronics I
Room 214
Chair(s): Oscar van der Straten and Christophe Vallée

14:00-14:20


G02 - Nano and Flexible Electronics II
Room 214
Chair(s): Oscar van der Straten and Christophe Vallée

14:20-15:40


G02 - Hybrid Materials
Room 214
Chair(s): Ganesh Sundaram and Anil U. Mane

Tuesday, 15 October 2019

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08:20-09:00


G02 - Tutorial on Atomic Layer Processing for Advanced Electronics
Room 214
Chair(s): Andrea Illiberi and Fred Roozeboom

09:00-12:40


G02 - Area Selective Deposition and Atomic Layer Etching I
Room 214
Chair(s): Andrea Illiberi, Jeffrey W. Elam and Chip Eddy

14:00-15:00


G02 - Area Selective Deposition and Atomic Layer Etching II
Room 214
Chair(s): Chanyuan Liu and Byungha Shin

15:00-17:20


G02 - Solar Energy Conversion: Photovoltaics and Photoelectrochemistry
Room 214
Chair(s): Jolien Dendooven and Rong Chen

18:00-20:00


G02 Poster Session
Grand Ballroom

Wednesday, 16 October 2019

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08:20-09:40


G02 - 2D Materials and Quantum Dots
Room 214
Chair(s): Stefan De Gendt and Rob Ameloot

10:00-12:25


G02 - Advanced Processing and Characterization
Room 214
Chair(s): Oscar van der Straten and Christophe Detavernier