G02 - Advanced Processing and Characterization

Wednesday, 16 October 2019: 10:00-12:25
Room 214 (The Hilton Atlanta)
Chairs:
Oscar van der Straten and Christophe Detavernier
10:00
Dielectric ALD with Hydrogen Peroxide: Comparative Study of Growth and Film Characteristics for Anhydrous H2O2, H2O2/H2o Mixtures, H2o and Ozone
D. Alvarez Jr., J. Spiegelman (RASIRC), K. Andachi, G. Tsuchibuchi, and K. Suzuki (Taiyo Nippon Sanso Corporation)
10:20
Atomic Layer Deposition of Al2O3 with Alcohol Oxidants for Impeding Substrate Oxidation
S. Seo, W. J. Woo, I. K. Oh, H. Kim (Yonsei University), and B. Shong (Hongik University)
10:40
Infrared and Optical Emission Spectroscopic Study on Atmospheric-Pressure Plasma-Enhanced Spatial ALD of Al2O3
M. A. Mione, R. Engeln, W. M. M. Kessels (Eindhoven University of Technology), and F. Roozeboom (Eindhoven University of Technology, TNO-Holst Centre)
11:00
(Invited) A Surface Science Toolbox for Understanding Atomic Layer Epitaxy
C. R. Eddy Jr. (U.S. Naval Research Laboratory), S. G. Rosenberg (ASEE Postdoctoral Fellow - residing at NRL), J. M. Woodward (ASEE - residing at NRL), V. R. Anderson (Mercer University), S. D. Johnson (U.S. Naval Research Laboratory), K. F. Ludwig, C. Wagenbach (Boston University), A. C. Kozen (ASEE Postdoctoral Fellow - residing at NRL), S. G. Walton (U.S. Naval Research Laboratory), D. R. Boris (U. S. Naval Research Laboratory), and N. Nepal (U.S. Naval Research Laboratory)
11:40
Probing the Atomic-Scale Structure of Thin Films Grown By Atomic Layer Deposition
M. J. Young (University of Missouri-Columbia), N. Bedford (University of New South Wales), J. W. Elam, A. Yanguas-Gil, S. Letourneau, M. Coile, D. Mandia (Argonne National Laboratory), S. M. George, A. S. Cavanagh (University of Colorado), X. He, A. Jasim, Q. Wyatt, T. White, H. Kaiser, and T. W. Heitmann (University of Missouri-Columbia)
12:00
Near Room Temperature PE-ALD of Nanostructured Gold for Enhanced Raman Scattering
M. Van Daele (Ghent University), M. B. E. Griffiths (Carleton University), A. Raza (Ghent University), M. M. Minjauw (Department of Solid State Sciences, Ghent University), E. Solano, J. Y. Feng (Ghent University), R. K. Ramachandran (Department of Solid State Sciences, Ghent University), S. Clemmen (Ghent University, Université Libre de Bruxelles), R. Baets (Ghent University), S. T. Barry (Carleton University), C. Detavernier (Ghent University, Dept. of Solid-state Sciences), and J. Dendooven (Department of Solid State Sciences, Ghent University)
12:20
Concluding Remarks