Electronic Materials and Processing

Monday, 14 October 2019

08:00-09:40

G05: Oxide Memristors 2


G05 - Memristive Properties of Complex Oxides
Room 210
Chair(s): Stephen S. Nonnenmann

08:00-11:00

G03: Semiconductor Process Integration 11


G03 - Materials and Characterizations
Room 211
Chair(s): Junichi Murota and Cor Claeys

08:35-09:20

G02: Atomic Layer Deposition Applications 15


G02 - Tutorial on ALD for Lithium-Ion Battery Applications
Room 214
Chair(s): Fred Roozeboom and Chanyuan Liu

09:20-11:00

G02: Atomic Layer Deposition Applications 15


G02 - Battery Applications
Room 214
Chair(s): Chanyuan Liu and Mark D. Losego

10:00-10:20

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Introductory Remarks
Room 209
Chair(s): Jerzy Ruzyllo

10:00-12:40

G05: Oxide Memristors 2


G05 - Resistive Switching in Binary Oxide Systems
Room 210
Chair(s): Stephen S. Nonnenmann

10:20-12:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - FEOL Cleaning
Room 209
Chair(s): Paul W. Mertens and Yusuke Oniki

11:00-11:40

G02: Atomic Layer Deposition Applications 15


G02 - Medical Applications
Room 214
Chair(s): Ganesh Sundaram and Jolien Dendooven

11:00-12:50

G03: Semiconductor Process Integration 11


G03 - Emerging Material Growth
Room 211
Chair(s): Meng Tao and Seiichi Miyazaki

11:40-12:40

G02: Atomic Layer Deposition Applications 15


G02 - Nano and Flexible Electronics I
Room 214
Chair(s): Oscar van der Straten and Christophe Vallée

14:00-14:20

G02: Atomic Layer Deposition Applications 15


G02 - Nano and Flexible Electronics II
Room 214
Chair(s): Oscar van der Straten and Christophe Vallée

14:00-15:30

G03: Semiconductor Process Integration 11


G03 - Advanced Post CMOS Devices and Processes
Room 211
Chair(s): Eddy Roger Simoen and Oussama Moutanabbir

14:00-15:40

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Ge, SiGe, or III-V Surface
Room 209
Chair(s): Anthony J. Muscat and Sangwoo Lim

G05: Oxide Memristors 2

14:20-15:40

G02: Atomic Layer Deposition Applications 15


G02 - Hybrid Materials
Room 214
Chair(s): Ganesh Sundaram and Anil U. Mane

15:45-16:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Short Introduction for Poster Presentation
Room 209
Chair(s): Koichiro Saga

16:00-17:40

G05: Oxide Memristors 2


G05 - Advances in Artificial Neural Networks
Room 210
Chair(s): Juan C. Nino

18:00-20:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 Poster Session
Grand Ballroom

G05: Oxide Memristors 2


G05 Poster Session
Grand Ballroom

Tuesday, 15 October 2019

08:00-09:40

G03: Semiconductor Process Integration 11


G03 - Wide-Gap Semiconductor Devices and Processes 1
Room 211
Chair(s): Yu Cao and Cor Claeys

08:20-09:00

G02: Atomic Layer Deposition Applications 15


G02 - Tutorial on Atomic Layer Processing for Advanced Electronics
Room 214
Chair(s): Andrea Illiberi and Fred Roozeboom

08:20-09:40

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - 3D Trends
Room 210
Chair(s): Wei-Ping Dow and Yasuhiko Takeno

08:30-10:30

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Wetting and Drying
Room 209
Chair(s): Derek Bassett and Yasutaka Yamaguchi

09:00-12:40

G02: Atomic Layer Deposition Applications 15


G02 - Area Selective Deposition and Atomic Layer Etching I
Room 214
Chair(s): Andrea Illiberi, Jeffrey W. Elam and Chip Eddy

10:00-12:00

G03: Semiconductor Process Integration 11


G03 - Wide-Gap Semiconductor Devices and Processes 2
Room 211
Chair(s): Yu Cao and Keisuke Shinohara

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - Copper Electrodeposition
Room 210
Chair(s): Kazuo Kondo and Wei-Ping Dow

10:50-12:30

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Wet Etching
Room 209
Chair(s): Sangwoo Lim and Derek Bassett

13:30-15:40

G03: Semiconductor Process Integration 11


G03 - Thin Film Devices and Processes
Room 211
Chair(s): Junichi Murota and James Sturm

14:00-15:00

G02: Atomic Layer Deposition Applications 15


G02 - Area Selective Deposition and Atomic Layer Etching II
Room 214
Chair(s): Chanyuan Liu and Byungha Shin

14:00-15:40

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - PCB Processes
Room 210
Chair(s): Muneharu Kondo and Rohan Akolkar

14:00-16:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Particle Removal
Room 209
Chair(s): Jin-Goo Park and Toshiyuki Sanada

15:00-17:20

G02: Atomic Layer Deposition Applications 15


G02 - Solar Energy Conversion: Photovoltaics and Photoelectrochemistry
Room 214
Chair(s): Jolien Dendooven and Rong Chen

16:00-17:40

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - High Density Interconnection
Room 210
Chair(s): Muneharu Kondo and Kazuo Kondo

16:00-18:20

G03: Semiconductor Process Integration 11


G03 - Emerging Technologies & Processes 1
Room 211
Chair(s): Meng Tao and Patrick Steglich

16:20-17:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Contamination Control
Room 209
Chair(s): Koichiro Saga

17:00-17:40

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - BEOL Cleaning
Room 209
Chair(s): Jerzy Ruzyllo

17:50-18:00

G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)


G01 - Concluding Remarks
Room 209
Chair(s): Anthony J. Muscat

18:00-20:00

G02: Atomic Layer Deposition Applications 15


G02 Poster Session
Grand Ballroom

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 Poster Session
Grand Ballroom

Wednesday, 16 October 2019

08:00-10:50

G03: Semiconductor Process Integration 11


G03 - Sensing Devices and Processes
Room 211
Chair(s): Junichi Murota and Hiromu Ishii

08:00-12:40

G04: Thermoelectric and Thermal Interface Materials 5


G04 - Thermoelectric and Thermal Interface Materials 1
Room 209
Chair(s): Colm O'Dwyer, Jr-Hau He, Kafil M. Razeeb and Walter van Schalkwijk

08:20-09:40

G02: Atomic Layer Deposition Applications 15


G02 - 2D Materials and Quantum Dots
Room 214
Chair(s): Stefan De Gendt and Rob Ameloot

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - Plating Additives
Room 210
Chair(s): Lingyun Wei and Wei-Ping Dow

10:00-12:00

G06: Materials and Processes for Semiconductor, 2.5 and 3D Chip Packaging, and High Density Interconnection PCB 2


G06 - 2.5 and 3D Packaging
Room 210
Chair(s): Makoto Motoyoshi and Lingyun Wei

10:00-12:25

G02: Atomic Layer Deposition Applications 15


G02 - Advanced Processing and Characterization
Room 214
Chair(s): Oscar van der Straten and Christophe Detavernier

10:50-11:50

G03: Semiconductor Process Integration 11


G03 - Electron-Emission/Memory Devices and Processes
Room 211
Chair(s): Junichi Murota and Hiromu Ishii

13:30-15:30

G03: Semiconductor Process Integration 11


G03 - Emerging Technologies & Processes 2
Room 211
Chair(s): Cor Claeys and Simon Deleonibus

14:00-18:00

G04: Thermoelectric and Thermal Interface Materials 5


G04 - Thermoelectric and Thermal Interface Materials 2
Room 209
Chair(s): Colm O'Dwyer, Kafil M. Razeeb, Walter van Schalkwijk and Jr-Hau He

15:50-17:30

G03: Semiconductor Process Integration 11


G03 - Quantum Devices and Processes
Room 211
Chair(s): Simon Deleonibus and Maud Vinet

18:00-20:00

G04: Thermoelectric and Thermal Interface Materials 5


G04 Poster Session
Grand Ballroom

Thursday, 17 October 2019

08:00-12:40

G04: Thermoelectric and Thermal Interface Materials 5


G04 - Thermoelectric and Thermal Interface Materials 3
Room 209
Chair(s): Jaeho Lee, Renkun Chen and Yue Wu

08:00-18:00


G04 - Thermoelectric and Thermal Interface Materials 5
Chair(s): Jaeho Lee, Renkun Chen, Colm O'Dwyer, Yue Wu, Jr-Hau He, Walter van Schalkwijk and Kafil M. Razeeb

14:00-14:40

G04: Thermoelectric and Thermal Interface Materials 5

14:40-17:20

G04: Thermoelectric and Thermal Interface Materials 5


G04 - Thermoelectric and Thermal Interface Materials 4
Room 209
Chair(s): Renkun Chen, Yue Wu and Jaeho Lee