G01 - Contamination Control

Tuesday, 15 October 2019: 16:20-17:00
Room 209 (The Hilton Atlanta)
Chair:
Koichiro Saga
16:20
Proactive Contamination Control: The Only Way to Enable Yield of Advanced Semiconductor Manufacturing
S. Libman (FTD Solutions LLC)
16:40
Quantitative Modelling of Airborne Molecular Contamination
P. W. Mertens (imec)
See more of: G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
See more of: Electronic Materials and Processing
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