G01 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)

Lead Organizer: Takeshi Hattori (Hattori Consulting International)

Co-organizers: Jerzy Ruzyllo (Pennsylvania State University) , Anthony J. Muscat (University of Arizona) , Koichiro Saga (Sony Semiconductor Solutions Corporation) and Paul W. Mertens (imec vzw)

Monday, 14 October 2019

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10:00-10:20


G01 - Introductory Remarks
Room 209
Chair(s): Jerzy Ruzyllo

10:20-12:00


G01 - FEOL Cleaning
Room 209
Chair(s): Paul W. Mertens and Yusuke Oniki

14:00-15:40


G01 - Ge, SiGe, or III-V Surface
Room 209
Chair(s): Anthony J. Muscat and Sangwoo Lim

15:45-16:00


G01 - Short Introduction for Poster Presentation
Room 209
Chair(s): Koichiro Saga

18:00-20:00


G01 Poster Session
Grand Ballroom

Tuesday, 15 October 2019

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08:30-10:30


G01 - Wetting and Drying
Room 209
Chair(s): Derek Bassett and Yasutaka Yamaguchi

10:50-12:30


G01 - Wet Etching
Room 209
Chair(s): Sangwoo Lim and Derek Bassett

14:00-16:00


G01 - Particle Removal
Room 209
Chair(s): Jin-Goo Park and Toshiyuki Sanada

16:20-17:00


G01 - Contamination Control
Room 209
Chair(s): Koichiro Saga

17:00-17:40


G01 - BEOL Cleaning
Room 209
Chair(s): Jerzy Ruzyllo

17:50-18:00


G01 - Concluding Remarks
Room 209
Chair(s): Anthony J. Muscat