G01 Poster Session

Monday, 14 October 2019: 18:00-20:00
Grand Ballroom (The Hilton Atlanta)
Effect of Seed Layer on Grain Size of Electroplated Cu
Y. C. Lin, P. F. Chan, and W. P. Dow (National Chung Hsing University)
Real Time Nanoscale Cleaning Phenomenon Observation during PVA Brush Scrubbing By Evanescent Field
Y. Terayama, K. Kusatsu, P. Khajornrungruang (Kyushu Institute of Technology), S. Hamada, Y. Wada, and H. Hiyama (Ebara Corporation)
Ion-Implanted Photoresist Stripping By Using Organic Solvents
E. Oh and S. Lim (Dept of Chemical and Biomolecular Eng, Yonsei University)
Surface Contamination with Si and O Impurities for GaN Single-Crystalline Layers Grown By Ultra-High-Vacuum Sputter Epitaxy
A. Mizuno, H. Shinoda, and N. Mutsukura (Tokyo Denki University)
See more of: G01: 16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16)
See more of: Electronic Materials and Processing
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