G01 - Particle Removal

Monday, 30 May 2022: 08:40-10:00
West Meeting Room 113 (Vancouver Convention Center)
Chairs:
Paul Mertens and Sangwoo Lim
08:40
Welcoming Remarks
09:00
Design of “Low Stress” Post-CMP Cleaning Processes for Advanced Technology Nodes
K. A. Cahue, A. L. Dudek, M. M. Miliauskas, T. R. Cahue, A. Mlynarski, and J. J. Keleher (Lewis University)
09:20
Real Time Nanoscale Cleaning Phenomenon Observation during Enforcing MHz Wave By Evanescent Field
Y. Terayama, P. Khajornrungruang, K. Suzuki, R. Mori (Kyushu Institute of Technology), S. Hamada, Y. Wada, and H. Hiyama (Ebara Corporation)