Electronic Materials and Processing

Monday, 30 May 2022

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08:40-10:00

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01 - Particle Removal
West Meeting Room 113
Chair(s): Paul Mertens and Sangwoo Lim

10:20-11:20

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01 - BEOL
West Meeting Room 113
Chair(s): Sangwoo Lim and Quoc-Toan Le

13:20-15:00

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01- Contamination Control and Metrology
West Meeting Room 113
Chair(s): Koichiro Saga and Philippe Garnier

Tuesday, 31 May 2022

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08:00-10:00

G02: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 12


G02 - Advanced Semiconductor Materials, Devices and Processing 1
West Meeting Room 115
Chair(s): Hemanth Jagannathan and Stefan De Gendt

08:00-11:40

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01 - Wetting and Drying
West Meeting Room 113
Chair(s): Tae-Gon Kim and Yasutaka Yamaguchi

10:20-12:20

G02: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 12


G02 - Advanced Semiconductor Materials, Devices and Processing 2
West Meeting Room 115
Chair(s): Yaw Obeng and Stefan De Gendt

14:00-15:20

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01 - Wet Etching
West Meeting Room 113
Chair(s): Antoine Pacco and Sangwoo Lim

14:00-18:00

G02: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 12


G02 - Post Si CMOS Materials, Devices and Integration
West Meeting Room 115
Chair(s): Durga Misra and Paul Timans

15:40-17:10

G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)


G01 - FEOL Digital Session
West Meeting Room 113
Chair(s): Paul Mertens and Koichiro Saga

18:00-20:00

LG: Late Presentations in Electronic Materials and Processing


LG: Late Presentations in Electronic Materials and Processing
West Ballroom B/C/D

Wednesday, 1 June 2022

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08:30-11:50

G02: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 12


G02 - Heterogeneous Integration and Packaging
West Meeting Room 115
Chair(s): Fred Roozeboom and Zia Karim

14:00-18:00

G02: Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 12


G02 - Quantum and Neuromorphic Computing
West Meeting Room 115
Chair(s): Kuniyuki Kakushima and Evgeni Gousev