G01- Contamination Control and Metrology

Saga, Koichiro

Monday, 30 May 2022: 13:20-15:00

West Meeting Room 113 (Vancouver Convention Center)

Chairs:

Koichiro Saga and Philippe Garnier

13:20

1248

(Invited) Metallic Impurity Control in Silicon Processing

M. Polignano (No company) and G. Borionetti (MEMC Electronic Materials SpA)

14:00

1249

Airborne Molecular Contamination: Mechanism and Consequences on Devices

P. Garnier, Y. Borde, and G. Sevilla (STMicroelectronics Crolles (38926))

14:20

1250

Effect of N₂-Anneal Temperature on Silicon Nitride Film: (I) Time-Dependent Dielectric Breakdown and ESR Evaluations

H. Kurita, M. Nakamura (ROHM Hamamatsu Co., LTD.), H. Miyagawa (Faculty of Engineering and Design, KAGAWA Univ.), and Y. Kamigaki (Electron and Bio Research Laboratory (EBL))

14:40

1251

Effect of N₂-Anneal Temperature on Silicon Nitride Film: (II) Fine Structures of ESR Spectrum and FTIR

H. Miyagawa (Faculty of Engineering and Design, KAGAWA Univ.), Y. Kamigaki (Electron and Bio Research Laboratory (EBL)), H. Kurita, and M. Nakamura (ROHM Hamamatsu Co., LTD.)

See more of: G01: 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)
See more of: Electronic Materials and Processing

<< Previous Session | Next Session >>