G01 17th International Symposium on Semiconductor Cleaning Science and Technology (SCST 17)

Lead Organizer: Anthony Muscat (University of Arizona)

Co-organizers: Koichiro Saga (Sony Semiconductor Solutions Corporation) , Paul Mertens (Katholieke Universiteit Leuven) , Takeshi Hattori (Hattori Consulting International) and Sangwoo Lim (Yonsei University)

Monday, 30 May 2022

Monday | Tuesday | top

08:40-10:00


G01 - Particle Removal
West Meeting Room 113
Chair(s): Paul Mertens and Sangwoo Lim

10:20-11:20


G01 - BEOL
West Meeting Room 113
Chair(s): Sangwoo Lim and Quoc-Toan Le

13:20-15:00


G01- Contamination Control and Metrology
West Meeting Room 113
Chair(s): Koichiro Saga and Philippe Garnier

Tuesday, 31 May 2022

Monday | Tuesday | top

08:00-11:40


G01 - Wetting and Drying
West Meeting Room 113
Chair(s): Tae-Gon Kim and Yasutaka Yamaguchi

14:00-15:20


G01 - Wet Etching
West Meeting Room 113
Chair(s): Antoine Pacco and Sangwoo Lim

15:40-17:10


G01 - FEOL Digital Session
West Meeting Room 113
Chair(s): Paul Mertens and Koichiro Saga