Substrate Effects in GaN-on-Si Hemt Technology for RF FEM Applications
S. Yadav (imec), P. Cardinael (Universite Catholique de Louvain, imec), M. Zhao, K. Vondkar, U. Peralagu, A. Alian, R. Rodriguez, A. Khaled (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium), S. Makovejev, E. Ekoga (incize), D. Lederer, J. P. Raskin (Universite Catholique de Louvain), B. Parvais (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium, VUB Brussels, Belgium), and N. Collaert (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium)