1220
Back-Channel Etched Double Layer In-W-O/In-W-Zn-O Thin-Film Transistors

Wednesday, 3 October 2018: 10:00
Universal 6 (Expo Center)
Z. H. Li, P. Y. Kuo, W. T. Chen, and P. T. Liu (Department of Photonics, National Chiao Tung University)
The thin-film transistors (TFTs) with back-channel etched (BCE) type enable channel length to be narrow and reduce parasitic capacitances owing to its shorter overlaps between the gate and source/drain (S/D) electrodes. In this study, a high-performance BCE-type oxide thin-film transistor was proposed for investigation. A novel stacked double layer In-W-O (IWO) / In-W-Zn-O (IWZO) channel structure was fabricated and developed. Respectively, IWZO exhibits a high resistance to back-channel etching damage and IWO channel achieve a high mobility. The double layer IWO/IWZO TFTs are promising candidates for driving active matrix organic light-emitting diode (AMOLED) and high resolution display applications in the future. The double layer IWO/IWZO TFTs with S/D pattern by H2O2 + KOH can exhibit the high-performance electrical characteristic. The field-effect mobility (µFE) ~ 21.1cm2/V-s, subthreshold swing (S.S.) ~ 0.15 V/dec., threshold voltage (VTH) ~ -0.092 V, and on/off ratio ~ 4.88×108 can be achieved.