Highly pure aluminum plates (99.999 wt%) were electropolished in a 78 vol% CH3COOH/22 vol% 70%-HClO4 solution. The electropolished specimens were immersed in a 0.05–1.0 M etidronic acid solution (150 mL) at 278–308 K and then anodized at a constant voltage of 260 V or a constant-current density of 2.5–50 Am−2 for up to 64 h. Two-step constant-voltage anodizing was also carried out for the fabrication of highly ordered porous alumina.
The electropolished specimens were anodized in etidronic acid solutions with various concentrations at various temperatures under the maximum current density condition without oxide burning. Figure 1 shows the changes in the Vickers hardness of the porous alumina, Hv, with changing concentration of the etidronic acid solution, c, at Ta = 278–308 K and ia = 5–40 Am−2. Here, the thickness was adjusted to approximately 55 µm in each anodized specimen. The Vickers hardness decreased with increasing solution temperature for all concentrations. In addition, the Vickers hardness also decreased with increasing concentration at each solution temperature. This decrease is due to the chemical dissolution of porous alumina during anodizing. A hard porous alumina film measuring Hv = 610 can be fabricated by anodizing in a 0.05 M etidronic acid solution at 278 K and 5 Am−2.