1157
(Invited) III-V Piezoelectrics for Sensors, Actuators, and Resonators

Monday, 1 October 2018: 11:00
Universal 24 (Expo Center)
B. Griffin (Sandia National Laboratories)
With the commercial success of film bulk acoustic resonators as RF filters for handsets, the manufacturing base of III-V piezoelectric thin films, namely aluminum nitride, is well established. The technology has recently expanded beyond RF filters to include microphones, ultrasonic transducers, near zero power wakeup devices, transducers for extreme environments, etc. This talk will discuss the expansion of the film’s applications and the advances in the material set needed to enable the next generation of devices.