Fabrication of Homogeneous Ultra-Thin Sige-on-Insulator Layer for Thermoelectric Applications
C. P. Goyal (GSST, Shizuoka University, Hamamatsu, Japan, SRM University, Chennai, India), M. Omprakash, K. Mutoh (RIE, Shizuoka University, Hamamatsu, Japan), S. Nishino (Toyota Technological Institute, Nagoya, Japan), T. Matsuki (Waseda University, Shinjuku, Tokyo, Japan, AIST, Tsukuba, Ibaraki, Japan), M. Navaneethan (SRM University, Chennai, T.N., India), T. Watanabe (Waseda University, Shinjuku, Tokyo, Japan), Y. Shimura (GSST, Shizuoka University, Hamamatsu, Japan, RIE, Shizuoka University, Hamamatsu, Japan), T. Takeuchi (Toyota Technological Institute, Nagoya, Japan), S. Ponnusamy (SRM University, Chennai, T.N., India), Y. Hayakawa, and H. Ikeda (GSST, Shizuoka University, Hamamatsu, Japan, RIE, Shizuoka University, Hamamatsu, Japan)