878
Turning an SOI Into MEMS Devices for Optics and RF

Monday, May 13, 2013: 11:10
Dominion Ballroom North, Second Floor (Sheraton)
Hiroshi Toshiyoshi, Ph.D. , The University of Tokyo, Tokyo, Japan

Abstract:

  • E6-0878 (632.9KB) - Abstract Text
See more of: MEMS Technology
See more of: E6: Advanced Semiconductor-on-Insulator Technology and Related Physics 16
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