879
Elimination of Curvature in Microelectromechanical-System Membrane
Monday, May 13, 2013: 11:50
Dominion Ballroom North, Second Floor (Sheraton)
Tomomi Sakata, Ph.D.
,
NTT Microsystem Integration Laboratories, Atsugi-shi, Japan
Keita Yamaguchi
,
NTT Microsystem Integration Laboratories
Naru Nemoto
,
NTT Microsystem Integration Laboratories
Mitsuo Usui
,
NTT Microsystem Integration Laboratories
Fumihiro Sassa, Ph.D.
,
NTT Microsystem Integration Laboratories
Kazuyoshi Ono
,
NTT Microsystem Integration Laboratories
Kazuhiko Takagahara
,
NTT Microsystem Integration Laboratories
Kei Kuwabara
,
NTT Microsystem Integration Laboratories
Junichi Kodate
,
NTT Microsystem Integration Laboratories
Yoshito Jin
,
NTT Microsystem Integration Laboratories
