MEMS Technology

Monday, May 13, 2013: 11:10-12:10
Dominion Ballroom North, Second Floor (Sheraton)
Chair:
Hiromu Ishii
11:10
878
Turning an SOI Into MEMS Devices for Optics and RF
Hiroshi Toshiyoshi, Ph.D., The University of Tokyo
11:50
879
Elimination of Curvature in Microelectromechanical-System Membrane
Tomomi Sakata, Ph.D., NTT Microsystem Integration Laboratories; Keita Yamaguchi, NTT Microsystem Integration Laboratories; Naru Nemoto, NTT Microsystem Integration Laboratories; Mitsuo Usui, NTT Microsystem Integration Laboratories; Fumihiro Sassa, Ph.D., NTT Microsystem Integration Laboratories; Kazuyoshi Ono, NTT Microsystem Integration Laboratories; Kazuhiko Takagahara, NTT Microsystem Integration Laboratories; Kei Kuwabara, NTT Microsystem Integration Laboratories; Junichi Kodate, NTT Microsystem Integration Laboratories; Yoshito Jin, NTT Microsystem Integration Laboratories
See more of: E6: Advanced Semiconductor-on-Insulator Technology and Related Physics 16
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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