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Defect Characterization of ALD Grown SiO2 Films: A Systematic Approach

Tuesday, May 14, 2013: 10:00
Norfolk, Mezzanine Level (Sheraton)
Frank L Pasquale , University of North Texas, Denton, TX
Shankar Swaminathan, PhD , Lam Research Inc., Tualatin, OR
Hu Kang , Lam Research Corporation
Adrien Lavoie, PhD , Lam Research Inc.

Abstract:

See more of: Non-Planar Devices: FINFETS/Nanowires
See more of: E5: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 3
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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