Non-Planar Devices: FINFETS/Nanowires

Tuesday, May 14, 2013: 08:00-10:20
Norfolk, Mezzanine Level (Sheraton)
Chairs:
P. J. Timans and E. P. Gusev
08:00
859
(Invited) Strain-Enhanced Performance of Si-Nanowire FETs
Mikaël Cassé, CEA LETI; Sylvain Barraud, CEA LETI; Rémi Coquand, CEA-Leti; Masahiro Koyama, CEA LETI; David Cooper, CEA LETI; C. Vizioz, CEA-Leti; C. Comboroure, CEA-Leti; P. Perreau, CEA-Leti; V. Maffini-Alvaro, CEA-Leti; C. Tabone, CEA-Leti; L. Tosti, CEA-Leti; S. Barnola, CEA-Leti; Vincent Delaye, CEA-Leti; Francois Aussenac, CEA France; Gérard Ghibaudo, IMEP-LAHC; Hiroshi Iwai, Tokyo Institute of Technology; Gilles Reimbold, CEA LETI
08:40
860
Deposited ALD SiO2 High-k/Metal Gate Interface for High Voltage Analog and I/O Devices on Next Generation Alternative Channels and FINFET Device Structures
Shahab Siddiqui, IBM Corporation; Murshed M Chowdhury, IBM Corporation; Maryjane Brodsky, IBM Corporation; Nilufa Rahim, IBM Corporation; Min Dai, IBM Corporation; Siddarth Krishnan, IBM Corporation; Steve Fugardi, IBM Corporation; Ernest Wu, IBM Corporation; Anthony Chou, IBM Corporation; Shreesh Narasimha, IBM Corporation; Jinghong Li, IBM Corporation; Kevin Mcstay, IBM Corporation; Barry Linder, IBM Corporation; Edward Maciejewski, IBM Corporation; Ryan Rettmann, IBM Corporation; Steven Mittl, IBM Corporation; Unoh Kwon, IBM Corporation; Vijay Narayanan, IBM Corporation; William Henson, IBM Corporation; Dominic Schepis, IBM Corporation; Michael Chudzik, IBM Corporation
09:00
861
Three-Dimensional Dopant/Carrier Profiling
Wilfried Vandervorst, KULeuven; A. Schulze, Imec; Ajay Kumar Kambham, imec; J. Mody, imec; M. Gilbert, imec; P. Eyben, imec
09:40
Break
10:00
862
Defect Characterization of ALD Grown SiO2 Films: A Systematic Approach
Frank L Pasquale, University of North Texas; Shankar Swaminathan, PhD, Lam Research Inc.; Hu Kang, Lam Research Corporation; Adrien Lavoie, PhD, Lam Research Inc.