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Deposited ALD SiO2 High-k/Metal Gate Interface for High Voltage Analog and I/O Devices on Next Generation Alternative Channels and FINFET Device Structures

Tuesday, May 14, 2013: 08:40
Norfolk, Mezzanine Level (Sheraton)
Shahab Siddiqui , IBM Corporation, Somers, NY
Murshed M Chowdhury , IBM Corporation
Maryjane Brodsky , IBM Corporation
Nilufa Rahim , IBM Corporation
Min Dai , IBM Corporation
Siddarth Krishnan , IBM Corporation
Steve Fugardi , IBM Corporation
Ernest Wu , IBM Corporation
Anthony Chou , IBM Corporation
Shreesh Narasimha , IBM Corporation
Jinghong Li , IBM Corporation
Kevin Mcstay , IBM Corporation
Barry Linder , IBM Corporation
Edward Maciejewski , IBM Corporation
Ryan Rettmann , IBM Corporation
Steven Mittl , IBM Corporation
Unoh Kwon , IBM Corporation
Vijay Narayanan , IBM Corporation
William Henson , IBM Corporation
Dominic Schepis , IBM Corporation
Michael Chudzik , IBM Corporation

Abstract:

  • E5-0860 (187.0KB) - Abstract Text