853
Evaluation of Stress Induced by Plasma Assisted ALD SiN Film
Monday, May 13, 2013: 11:40
Norfolk, Mezzanine Level (Sheraton)
Kohki Nagata, Master
,
Meiji University, Kawasaki, Japan
Masaya Nagasaka, Bachelor
,
Meiji University
Takuya Yamaguchi, Bachelor
,
Meiji University
Atsushi Ogura
,
Meiji University
Hiroshi Oji
,
Japan Synchrotron Radiation Research Institute
Jin-Young Son
,
Japan Synchrotron Radiation Research Institute
Ichiro Hirosawa
,
Japan Synchrotron Radiation Research Institute
Y. Watanabe
,
Tokyo Electron, Ltd.
Y. Hirota
,
Tokyo Electron, Ltd.
