774
Effect of Moisture on Electrical and Reliability Characteristics for Dense and Porous Low-k Dielectrics

Wednesday, May 15, 2013
Osgoode Ballroom, Lower Concourse Level (Sheraton)
Yi-Lung Cheng, PH.D , National Chi-Nan University, Taiwan, Taiwan
Jun-Fu Huang, Master , National Chi-Nan University
Wei-Yuan Chang, Master , Department of Materials Science and Engineering, National Chiao-Tung University
Yu-Min Chang, PH.D , Department of Materials Science and Engineering, National Chiao-Tung University
Jihperng (Jim) Leu , National Chiao Tung University

Abstract:

  • E2-0774 (266.0KB) - Abstract Text