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Effect of Composition Rate on Erbium Silicide Work Function on Different Silicon Surface Orientation

Wednesday, May 15, 2013
Osgoode Ballroom, Lower Concourse Level (Sheraton)
Hiroaki Tanaka, Ph. D , Tohoku University, Sendai, Japan
Akinobu Teramoto , Tohoku University
Tsukasa Motoya , Mitsubisi Electric Corporation
Shigetoshi Sugawa , Tohoku University
Tadahiro Ohmi , Tohoku University

Abstract:

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