746
(Invited) Stress Simulations of Si- and Ge-Channel FinFETs for the 14 nm-Node and Beyond

Tuesday, May 14, 2013: 10:10
Provincial Ballroom North, Second Floor (Sheraton)
Geert Eneman , imec, Heverlee, Belgium
David P. Brunco , imec
Liesbeth Witters , imec
Benjamin Vincent , imec
Paola Favia , imec
Andriy Hikavyy , imec
An De Keersgieter , imec
Jerome Mitard , imec
Roger Loo , imec
Anabela Veloso , Imec, Leuven, Belgium
Olivier Richard , imec
Hugo Bender , imec
Wilfried Vandervorst , imec
Matty Caymax , imec
Naoto Horiguchi , Imec
Nadine Collaert, PhD , imec
Aaron Thean , imec

Abstract:

See more of: Germanium Nanostructures and Devices
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