895
Determination of Effective Capacitance Area for Pseudo-MOSFET Based Characterization of Bare SOI Wafers by Split-C(V) Measurements

Tuesday, May 14, 2013: 15:40
Dominion Ballroom North, Second Floor (Sheraton)
Cristina Fernandez , University of Granada, Granada, Spain
Noel Rodriguez , University of Granada, Granada, Spain
Akiko Ohata , IMEP-MINATEC
Amer Diab , IMEP-MINATEC
Francisco Gamiz , University of Granada
Sorin Cristoloveanu , IMEP-MINATEC

Abstract:

  • E6-0895 (271.9KB) - Abstract Text
See more of: Characterization and Related Physics
See more of: E6: Advanced Semiconductor-on-Insulator Technology and Related Physics 16
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