1862
Diaphragm Durability Enhancement for Valves Supplying Gas for Atomic Layer Deposition

Wednesday, October 30, 2013
Grand Ballroom, Tower 2, Grand Ballroom Level (Hilton San Francisco Union Square)
Michio Yamaji , Tohoku University, Osaka, Japan
Tsuyoshi Tanikawa , Fujikin Incorporated
Tadayuki Yakushijin , Fujikin Incorporated
Takashi Funakoshi , Fujikin Incorporated
Satoru Yamashita , Fujikin Incorporated
Atsushi Hidaka , Fujikin Incorporated
Masaaki Nagase , Fujikin Incorporated
Nobukazu Ikeda , Fujikin Incorporated
Shigetoshi Sugawa, Ph. D. , Tohoku University
Tadahiro Ohmi, Ph. D. , Tohoku University

Abstract:

See more of: Poster Session
See more of: E2: Atomic Layer Deposition Applications 9
See more of: Dielectric and Semiconductor Materials, Devices, and Processing
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