(Invited) Wetting Behavior of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish

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(Invited) Wetting Behavior of Aqueous Solutions on High Aspect Ratio Nanopillars with Hydrophilic Surface Finish

Tuesday, October 29, 2013: 14:00

Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)

Guy Vereecke , imec, Leuven, Belgium

XiuMei Xu, Ph.D. , imec

Wei-Kang Tsai, M.Eng. , University of Southern California

Hui Yang , K.U. Leuven

Silvia Armini, Ph.D. , imec, Heverlee, Belgium

Tinne Delande, M.Eng. , imec

Geert Doumen, M.Eng. , imec

Frank Kentie, M.Eng. , Katholieke Universiteit Leuven

Xiaoping Shi, Ph.D. , imec

Ihsan Simms , Tokyo Electron

Kathleen Nafus , Tokyo Electron

Frank Holsteyns , imec

Herbert Struyf, Ph.D. , imec

Stefan De Gendt , IMEC

Abstract: