Surface Preparation of Si and Ge Wafers Using Functional Water

Wednesday, October 30, 2013: 11:20
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Hiroto Tokoshima, Bachelor degree , Kurita Water Industries LTD., Tochigi, Japan
Toru Masaoka, Master degree , Kurita Water Industries LTD.
Nobuko Gan, Master degree , Kurita Water Industries LTD.
Hiroshi Morita, Doctorate degree , Kurita Water Industries LTD.

Abstract:

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