1872
(Invited) Spatial Atomic Layer Deposition of Transparent Conductive Oxides

Thursday, October 31, 2013: 10:00
Continental 8, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
A. Illiberi , TNO Thin Films Technology Department and Holst Centre, Eindhoven, Netherlands
R. Scherpenborg , TNO Thin Films Technology Department and Holst Centre
P. Poodt , TNO Thin Films Technology Department and Holst Centre
F. Roozeboom , Eindhoven University of Technology

Abstract:

  • E2-1872 (111.9KB) - Abstract Text
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