2217
(Invited) Development of Multifunctional Liner/Barrier Systems for Sub-14nm Metallization
(Invited) Development of Multifunctional Liner/Barrier Systems for Sub-14nm Metallization
Monday, October 28, 2013: 11:30
Continental 7, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Abstract:
- E12-2217 (966.5KB) - Abstract Text