1895
Growth of High-Quality GaN Template from Nanometer-Size Lattice Channels by Hydride Vapor Phase Epitaxy

Monday, October 28, 2013: 09:10
Continental 9, Tower 3, Ballroom Level (Hilton San Francisco Union Square)
Akira Usui , Nitride Semiconductor Department, Furukawa Co., Ltd., Oyama, Japan
Hiroki Goto , Nitride Semiconductor Department, Furukawa Co., Ltd.
Toshiharu Matsueda , Nitride Semiconductor Department, Furukawa Co., Ltd.
Haruo Sunakawa , Nitride Semiconductor Department, Furukawa Co., Ltd.
Takuya Nakagawa , Nitride Semiconductor Department, Furukawa Co., Ltd.
Akiko Okada , Institute for Nanoscience and Nanotechnology, Waseda University
Jun Mizuno , Institute for Nanoscience and Nanotechnology, Waseda University
Atsushi A. Yamaguchi , Optoelectronic Device System R&D Center, Kanazawa Institute of Technology
Hidetoshi Shinohara , Nano Processing System Division, Toshiba Machine Co., Ltd.
Hiroshi Goto , Nano Processing System Division, Toshiba Machine Co., Ltd.

Abstract: